Chemical-mechanical planarization

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21	PDF Document Add to Reading List Source URL: www.prostek.com Language: English - Date: 2005-07-01 04:30:02 Technology Wafer Mechanical engineering Metalworking terminology Tribology Etching Surface roughness Chemical-mechanical planarization Semiconductor device fabrication Materials science Microtechnology
22	PDF Document Add to Reading List Source URL: www.ieee-uffc.org Language: English - Date: 2008-12-29 17:55:23 Technology Capacitive Micromachined Ultrasonic Transducers Microelectromechanical systems Etching Plasma-enhanced chemical vapor deposition Chemical vapor deposition Polycrystalline silicon Strain engineering Chemical-mechanical planarization Semiconductor device fabrication Materials science Chemistry